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These results, although limited to a particular chromium deposition process and a particular mask material, confirm that the intrinsic crack-free surface domain is independent of the surface morphological characteristics (shape and dimension) and of the applied mask material, although they do depend on the thickness and the pattern shape. They also point out the need to take into account these aspects for the design of the manufacturing process of large-scale graphene-based devices. Conversely, it is a priori clear that these features should not be relevant for the manufacturing of nanoscale devices because they already result from the intrinsic crack-free mechanism of the underlying SiO2/Si interface. The understanding of the intrinsic crack-free surface domain is important as in the case of e-beam lithography, where the size of the surface domain is one of the fundamental parameters to be controlled in order to get reproducible patterns. As the domain size of a-C is about ten times smaller than the mask dimension, it is expected that the intrinsic crack-free surface domain may play a significant role in the future manufacturing of large-scale graphene-based devices.
Experimental and theoretical investigations are required to uncover their origin in terms of the fundamental processes and phenomena involved in the process of metal film growth. In particular, a quantitative analysis of the intrinsic growth processes involved in the nucleation and growth of micro-cracks will be needed to justify the use of these materials.
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